42.1: A Class of Micromachined Gyroscopes with increased Parametric Space
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منابع مشابه
The Development of Micromachined Gyroscope Structure and Circuitry Technology
This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface...
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